Realizing that Liang Yuan was in a daze, the two girls realized that Liang Yuan was distracted and thinking about the things he said he had suddenly forgotten.
The twins bit a straw, nodded their heads absentmindedly, poked the bottomed glass of "grape soda" with the straw, and stared at Liang Yuan with curious eyes.
"Jiajia, do you think Zhutou remembered something?"
"Hmm~, they look similar."
The two girls, out of curiosity and afraid of disturbing Liang Yuan's train of thought, just chatted in a low voice. They also helped Liang Yuan pay attention to his surroundings, fearing that the acquaintances who came to say hello would disturb him.
About five or six minutes later, Liang Yuan, who was thinking hard, raised his brows and reached out to pat the table in front of him. Due to his strong force, the wine glasses on the table were slightly moved. : :
"Xiaoyuan, do you remember?"
The twins asked in unison.
"Hmm~!"
Liang Yuan nodded heavily.
"What is Xiaoyuan thinking of?"
Ning Wanjia asked curiously.
"Well, come on, come downstairs and talk to me~"
Liang Yuan took the hands of the two girls and stood up and walked downstairs.
The two girls followed Liang Yuan out of the canteen and walked along the path to the lake. Liang Yuan pointed at the starry lake and said with a smile: "Tomorrow I will build a two-ton medal and throw it into the lake to reward those who bring inspiration." South Lake.¡±
"Xiaoyuan, what on earth is it?"
The two girls stared at the lake in confusion, not wanting to understand what inspiration could be found in this ordinary lake.
"Wait a minute, you two will understand when the car comes~"
Liang Yuan said with a smile.
The test of the maglev train was very intense. The three of them stood by the lake for about five minutes. A blue maglev capsule train with three reconnected sections turned out from the jungle on the south side of the lake shore. After a few breaths, they boarded the cross-lake track.
Liang Yuan wanted to share his joy with the two girls. He did not use physical concepts such as refraction and reflection to explain the inspiration he had just recalled, and decided to reenact reality as it was.
¡°Look carefully at the train light projection on the lake~¡±
Liang Yuan pointed at the blue light spot projection left by the maglev capsule train on the lake and said quickly.
"Look carefully, is the projection on the water constantly fluctuating~"
"Well, yes~"
"The reason for the fluctuations should be the wind."
"Look at the change in the size of the light spot. It looks like a square for a while and a rectangle for a while~"
Liang Yuan gave a hint.
"Well, yes, it's just not obvious."
"If you think of the maglev capsule train as a light source, what can you two think of this light projection that keeps changing its width?"
This matter originally started because of the photolithography machine, so the two girls naturally leaned on this topic immediately. The twins stared at the projection on the water in silence for a few seconds, and then suddenly recalled it.
"Xiaoyuan, you mean to use water to change the line width of the light source~"
"Change the light source output through refraction~"
The twins' academic performance has always been inferior to Liang Yuan's, and the refraction of light is not a particularly abstract thing. Under Liang Yuan's obvious prompts, the two girls guessed the key points of Liang Yuan's words almost at the same time.
"Ah~ah~ah~The pig head is so awesome!"
"Ah, the pig head is finally reliable for once. So many people in Hong Kong Base Electricity Collection have never thought of starting from this direction."
The two happy girls raised their heads slightly and rewarded Liang Yuan with two kisses.
"This is just a principle. It's hard to say whether it can actually be used. I'll have to find someone who knows how to ask it tomorrow~"
Liang Yuan said very proudly.
It was already midnight when the three of them returned home from the lake. The elders of both families were left behind by the three of them on Hong Kong Island. After washing and saying good night, Ning Wanfei, who was in a good mood, flirted with Liang Yuan before closing the bedroom door. Do you want to come over and lay the floor? Seeing Ning Wanjia smiling but not smiling, Liang Tuhao was so scared that he ran away.
The next day, Liang Yuan, who had something on his mind, did not bother to comfort the three people who suffered the fire, and left the job of explaining the matter to Wang Mengmeng and the others to two girls. After getting up early, Liang Yuan went directly to the Hong Kong Base Power Collection, and still asked Wang Xin and Wang Mengmeng. Liu Feiyang and Nie Xiaotian were caught having a meeting in a small conference room.
"Young Master, did you pick up someone from somewhere again today?"
Liu Feiyang found that the lineup at the meeting was the same as yesterday, so he told a relatively low-temperature joke.
Who picks up photolithography machines every day? Liang YuanLiang Yuan looked at Liu Feiyang unhappily.
"Nie Xiaotian, go and lock the door, the kind that opens inside the house."
As soon as Liang Yuan said these words, the trio of technical experts knew that the matter was serious.
"I'll do it~"
Liu Feiyang put away his relaxed attitude and quickly locked the door of the small conference room into a manual lock.
"Yesterday, when I was listening to everyone discussing the 193 light source barrier, an idea came to my mind~"
Liang Yuan did not go straight to the topic.
"But this inspiration just flashed for a moment, and then I forgot about it~"
Liang Yuan made a helpless expression.
Although the trio of technical experts didn¡¯t speak a word, their expressions were very unified: ¡°You¡¯re kidding me.¡±
"I went to the cafeteria with the two girls to eat in the evening, and I kept thinking about it. You have all experienced that feeling of forgetting something but being able to remember it immediately. I was like that last night~"
"Feifei saw that I was in pain, so she opened a few bottles of grape soda~"
Although Liang Yuan wrote Chicken Soup for the Soul seriously, as soon as the term grape soda was uttered, low laughter rang out in the small conference room. Ning Wanfei's grape-flavored soda has become a very famous "meme" in Yuanjia.
"Hahaha, don't laugh~ It's a meeting~"
Liang Yuan himself also laughed.
"Grape soda is still useful. Once a person enters a drunken state, his or her vision will inevitably become distorted and distorted~"
Liang Yuan connected the light spot projection of the maglev capsule train with the changes in the width of the lake surface, and then associated it with the refraction of the liquid and the lens of the lithography machine.
Before Newton, countless people were hit on the head by things but did not discover gravity. Before Liang Tuhao, countless drunkards were drunk and confused and did not expect the line width of the lithography machine. Liang Yuan himself felt that this pot of chicken soup was quite stylish.
"Tell me, if you drop the wafer in water and do photolithography, will it help increase the na value~"
Liang Yuan asked fakely.
Except for extreme conditions, the laws of physics will definitely not change. Dropping the wafer into water will of course increase the na value of the lens in disguise.
"Fuck you!"
The trio of technical tycoons were all frightened. Liu Feiyang and Nie Xiaotian couldn¡¯t even hold back their modal particles that were not in line with social expectations.
Wang Xin completely looked like the world had changed so much, as if he had suddenly seen a ghost.
There was silence in the small conference room. I don¡¯t know how long it took. Wang Xin murmured: "Young Master, I completely believe that you are a scientific genius who was delayed by making money."
Liu Feiyang let out a small "uh" and swallowed back the words that he almost blurted out that the young master really had the attributes of a mascot.
Last night, Liu Feiyang and Nie Xiaotian finished entertaining Fang Weilin and his party. When they went home together, they even laughed and said that Hong Kong Base Electric has the attributes of a mascot. The 193 nanometer light source barrier must be broken by us catching up. How can we just go back? After a good night's sleep at home, Liang Yuan immediately had sex the next day.
Once the thing about adding water to the lens is poked through, there will be almost a flat plain behind it. For a trio of technical experts, they can just take a piece of paper and calculate the future of this thing.
The refractive index of water is 1.44. The line width of the wafer production line currently operated by Hong Kong Base Electric is 5 microns. If lithography is performed directly in water, as Liang Yuan said, there is no need to change the number of lens groups of the lithography machine or replace it with a new light source. , you can directly change the line width to 3.5 microns.
"Young master, this idea is simply genius~"
"Ten years ago, there was a dispute between dry etching and wet etching. As a result, dry etching eliminated wet etching. Unexpectedly, after changing the idea, wet etching was resurrected."
"Old Nie, what you said is not accurate. To put it bluntly, dry etching and wet etching are rinses, and they are completely different things."
Both photolithography machines and etching machines are the core equipment of the wafer production line. Since the technical principle of wafer production originated from cameras, the photolithography machine can be approximately regarded as shooting, the etching machine is regarded as rinse, and the processed wafer is photo.
In the mid-1970s, mainstream etching machines used liquid chemical solvents to rinse the photoresist after the wafers were exposed by the photolithography machine, so it was also called wet etching. In the late 1970s and early 1980s, Toyo Nikon used dry etching with gas rinses. The development of wet etching machines has matured, and it only took a few years to eliminate wet etching with complicated operations and serious corrosion and pollution.
"It's a pity that for more than 20 years, no one in Japan thought of moving the wet process to the previous production link.
Generally speaking, there are three technical routes for immersion lithography machines:
The first is the spray method. As the name suggests, water is sprayed onto the wafer and then quickly taken away. The common spray method process is to set an ultra-precision nozzle on one side of the lens, and the water is sprayed along with the lens processing movement. Spray under the lens and suck the water away from the other side of the lens.
This method has extremely high requirements for ultra-precision processing capabilities and computer control capabilities. Stably establishing an ultra-thin water film in the working area under the lens is no easier than producing a photolithography machine. If the capabilities of precision processing and precision control are not enough , will lead to poor exposure of the wafer edge, seriously affecting the yield rate of the wafer production line.
However, the biggest advantage of the spray method is that it can fully utilize existing equipment. It can be said that this set of water spray and water absorption equipment is completely independent of the wafer production line and is only linked to the photolithography lens. It is difficult and difficult to upgrade the wafer production line technology. The costs are extremely low.
The second method is called the bathtub method. This method is similar to what Liang Yuan just mentioned, that is, the entire wafer is thrown into the water, and the container containing the wafer ¡ú the bathtub moves with the wafer workbench.
The advantage of this method is that the engineering technical difficulty is low and it will not have a negative impact on the yield rate of the wafer production line. However, the disadvantage is that it requires major changes to the existing wafer production line, and a new one that can be used in the wafer production line must be developed. For photoresist working in water, the wafer workbench must be improved, and due to the increased weight of water on the wafer workbench, the production rhythm of the wafer production line will also change. Compared with the spray wafer production line, Production efficiency will decrease to a certain extent.
The third method is called the swimming pool method, which is to complete the entire photolithography process by throwing it into water. Although this method can minimize the line width, operating in water is equivalent to re-developing a wafer production system, regardless of engineering. Both the difficulty and economic cost are too high.
After the new century, the international mainstream route of immersion lithography machines adopts the spray method. However, based on the current strength of Hong Kong-based power collectors, the second bathtub method is the most suitable. After the new century, Nikon and Esmore The reason why I chose the spray method route is that one is that the two companies have high levels of precision processing and precision control, and the other is that most of the existing photolithography equipment in the world are sold by these two companies. Of course, the lower the upgrade cost. The simpler the upgrade method, the better. PC::/
In the early 1990s, the dividing line between process technology and chip design was far less clear than it would be in the future. Although the trio of technology tycoons currently focus on chip design, all three of them knew the wafer manufacturing process well and could easily throw it away. Being a line leader on that production line will definitely make you rich.
Liu Feiyang wrote most of the calculations on the paper, then raised his head and said to Liang Yuan in an unbelievable tone: "Master, if the equipment imported from Siemens is put into production and the idea of ??Master is put into the production line, we will directly It has caught up with the international advanced level.¡±
The Torch Project of the Republic, led by Hong Kong Base Electric, belongs to the basic scientific research category and is not kept confidential at all. The financial audit of Hong Kong Base Electric is cross-audited by a third-party accounting firm. Liang Yuan plans to purchase a large number of domestically produced 5 micron crystals. The circular production line cannot be hidden on financial statements.
Of course, although the introduction of third-party accounting firms is not conducive to corporate confidentiality to a certain extent, it is still very helpful in promoting international exchanges and the introduction of technology.
With the mature mass production of Hong Kong Base's 5 micron wafer production line, the overseas electronics industry giants at this time have realized that the 3 micron line width may be a breakthrough for Hong Kong Base at any time. Once Hong Kong Base Electronics has independently broken through the 3-micron process technology, and there is probably no need to spend a lot of money to introduce 2-micron overseas process technology.
Therefore, Su Liangyu and others went to Siemens to negotiate this time and received an extremely warm reception from Siemens Semiconductors. Their attitude was completely different from three months ago. Siemens even promised to lobby within the European electronics industry to strive for an early 2-micron process technology has been removed from the monitoring list of Battery.
In fact, even if Liang Yuan did not interfere with history, in the second half of 1991, the Batumi organization itself began to discuss the feasibility of opening the 2-micron process technology to the Republic.
However, the background of the policy relaxation at that time was that the Polar Bear collapsed and the Republic went north to poach people. Overseas electronics groups were afraid that the Republic would borrow the talents of the Polar Bear¡¯s electronics industry to rise rapidly, so they decided to relax technology export standards to influence the Republic¡¯s electronics industry policy.
"The most advanced overseas 0.5 micron process has not yet been put into production. The most advanced production lines currently in production are only the 1.0 micron lines of Toshiba, Nec and Motorola. According to Intel's technology roadmap, the 0.5 micron production line will not start operation until the third quarter of next year. Mr. Su is talking with Siemens about 1.5 micron lines. If we move faster and develop this thing proposed by Mr. Da Shao on the basis of the 1.5 micron process, we can directly push the process line width to 1 micron. Overseas electronics I¡¯m afraid the group will go crazy~¡±
In the 1990s, overseas suppression of the RepublicThe technology generation gap in the electronics industry is basically stable at three generations. If we directly increase the process line width to 1.0 micron as Nie Xiaotian said, we will really step on the tail of foreigners. We must be really crazy. Hong Kong Foundation Group The electricity may be thrown under a shadowless lamp and a magnifying glass and hung up for observation.
¡°We¡¯ll talk about this in advance. Let¡¯s make a simple framework first. Write down any precautions now, and then go to the laboratory pilot workshop to try out the ideas I mentioned.¡±
"Even if it can be done, don't modify the equipment of foreigners. It is convenient for us to directly modify the domestically produced ones. The 5.0 line width and the 3.0 line width are really two kinds of chips. Even if we can modify the overseas lines successfully, the output will be higher. In addition to the false name It¡¯s of no use.¡±
Liang Yuanfeng dismissed Nie Xiaotian's hypothesis.
"Let me mention it first. The first issue is the purity of water. Bubbles and impurities in ordinary water will definitely seriously affect the yield. What we can use must be ultrapure water. I guess the ultrapure water used in general laboratories is The water is probably not yet pure, and the purity of the top-notch one is at least sixty-nine, but the source of this thing depends on the age~"
Wang Xin said that the purity of ultrapure water is almost microscopic to the molecular level. At least all the heavy water in the water must be separated. The only department in the Republic that can produce this thing is the Ministry of Nuclear Industry.
Generally speaking, the kind of ultrapure water Wang Xin wants is a by-product of heavy water separation. I can probably count the number of people in the world who are capable of producing this on two hands. The price of heavy water in the 1990s was 5 yuan per milliliter. There¡¯s really no way to measure the value of this by-product.
"I will solve this problem."
Liang Yuan acted resolutely and directly picked up the phone to contact Ning Lei, who was on vacation in Hong Kong Island.
The two middle-aged women wanted to enjoy the skyline swimming pool at home, so Comrade Ning Lei and Lao Liang didn't go anywhere. Liang Yuan found the person immediately.
"Why did Xiaoyuan remember to call Uncle Ning? Could it be that he had a severe fever and was expelled from Dongda~"
Ning Lei smiled and joked with Liang Yuan, but for Liang Yuan, Ning Lei hit the nail on the head with his first sentence and killed the conversation.
This is a ridiculous thing. Although the future with two girls sitting at the same table is worth looking forward to, Liang Yuan¡¯s head hurts just thinking about how to explain this matter to his family.
"Uncle Ning, I'm holding a technical meeting here at Hong Kong Base Electricity Collection. If nothing else happens, the confidentiality level in the future should be top secret."
Liang Yuan decided to ignore the fact that he was sent back to high school for the time being, and use work to deal with his family first.
"Oh, if there's anything you need, Xiaoyuan just tell me."
When Ning Lei heard that it was top secret, he knew that Liang Yuan could not joke about this kind of thing, and his attitude suddenly became serious.
"Hong Kong-based power collection is developing a technology that can catch up with the international top process line width. It requires molecular-level ultrapure water, preferably a by-product of heavy water separation~"
"How much do you need?"
Ning Lei¡¯s words are concise and concise.
"How many do you need? Can you three touch it?"
Liang Yuan turned around and asked the trio of technical experts.